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Electrodeposition of thin tantalum layers from ionic liquids and measurement of their electrical properties
Svobodová, Ivana ; Boušek, Jaroslav (referee) ; Šimůnková, Helena (advisor)
The thesis is focused on the electrodeposition of tantalum from ionic solution 1-butyl-1- methylpyrrolidinium bis(trifluoromethylsulfonyl) imide, ([BMP]Tf2N) at 200°C and description of related transfer and kinetic phenomena on the interface between the ionic solution and working electrode. Furthermore, the electrodeposition of tantalum layers in different ionic solutions containing tantalum salts and especially in ([BMP]Tf2N) is introduced. In the last part of the thesis, results of cyclic voltammetry, surface analysis SEM and elemental analysis EDX are discussed. MIS (metal-insulator-semiconductor) structure was determined comprising porous anodic alumina as the insulator and semiconductive TaxOy on the top of the insulator. The electric conductivity of the MIS structures was studied by using amper-volt IV and CV characteristics. The results of the cyclic voltametry, impedance spectroscopy and chronoamperometry are discussed.
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Electrodeposition of thin tantalum layers from ionic liquids and measurement of their electrical properties
Svobodová, Ivana ; Boušek, Jaroslav (referee) ; Šimůnková, Helena (advisor)
The thesis is focused on the electrodeposition of tantalum from ionic solution 1-butyl-1- methylpyrrolidinium bis(trifluoromethylsulfonyl) imide, ([BMP]Tf2N) at 200°C and description of related transfer and kinetic phenomena on the interface between the ionic solution and working electrode. Furthermore, the electrodeposition of tantalum layers in different ionic solutions containing tantalum salts and especially in ([BMP]Tf2N) is introduced. In the last part of the thesis, results of cyclic voltammetry, surface analysis SEM and elemental analysis EDX are discussed. MIS (metal-insulator-semiconductor) structure was determined comprising porous anodic alumina as the insulator and semiconductive TaxOy on the top of the insulator. The electric conductivity of the MIS structures was studied by using amper-volt IV and CV characteristics. The results of the cyclic voltametry, impedance spectroscopy and chronoamperometry are discussed.
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